Showerhead, semiconductor manufacturing apparatus including the same, and semiconductor manufacturing method (Q118612243)
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US patent 11225715
| Language | Label | Description | Also known as |
|---|---|---|---|
| English | Showerhead, semiconductor manufacturing apparatus including the same, and semiconductor manufacturing method |
US patent 11225715 |
Statements
Showerhead, semiconductor manufacturing apparatus including the same, and semiconductor manufacturing method (English)
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Byung-Sun Park (Suwon-si)
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Ik Soo Kim (Yongin-si)
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Jiwoon Im (Hwaseong-si)
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Sangho Rha (Seongnam-si)
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Minjae Oh (Hwaseong-si)
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