Multizone flow gasbox for processing chamber (Q121889819)
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US patent 11367594
| Language | Label | Description | Also known as |
|---|---|---|---|
| English | Multizone flow gasbox for processing chamber |
US patent 11367594 |
Statements
Multizone flow gasbox for processing chamber (English)
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Mingle Tong (San Jose, CA)
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Li-Qun Xia (Cupertino, CA)
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Daemian Raj Benjamin Raj (Fremont, CA)
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