Influence of apparatus geometry and deposition conditions on the structure and topography of thick sputtered coatings (Q29036099)
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scientific article (publication date: July 1974)
| Language | Label | Description | Also known as |
|---|---|---|---|
| English | Influence of apparatus geometry and deposition conditions on the structure and topography of thick sputtered coatings |
scientific article (publication date: July 1974) |
Statements
Influence of apparatus geometry and deposition conditions on the structure and topography of thick sputtered coatings (English)
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John A. Thornton
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July 1974
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11
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4
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666-670
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Identifiers
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