A Water-Amine-Complexing Agent System for Etching Silicon (Q29305342)
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scientific article (publication date: 1967)
Language | Label | Description | Also known as |
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English | A Water-Amine-Complexing Agent System for Etching Silicon |
scientific article (publication date: 1967) |
Statements
A Water-Amine-Complexing Agent System for Etching Silicon (English)
1 reference
R. M. Finne
1 reference
D. L Klein
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1967
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114
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9
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965
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Identifiers
1 reference