Surface chemistry of atomic layer deposition: A case study for the trimethylaluminum/water process (Q29393418)
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scientific article (publication date: 15 June 2005)
| Language | Label | Description | Also known as |
|---|---|---|---|
| English | Surface chemistry of atomic layer deposition: A case study for the trimethylaluminum/water process |
scientific article (publication date: 15 June 2005) |
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Surface chemistry of atomic layer deposition: A case study for the trimethylaluminum/water process (English)
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Riikka L. Puurunen
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15 June 2005
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97
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121301
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