Three-dimensional imaging of nanovoids in copper interconnects using incoherent bright field tomography (Q29999325)
Jump to navigation
Jump to search
scientific article (publication date: 12 June 2006)
| Language | Label | Description | Also known as |
|---|---|---|---|
| English | Three-dimensional imaging of nanovoids in copper interconnects using incoherent bright field tomography |
scientific article (publication date: 12 June 2006) |
Statements
Three-dimensional imaging of nanovoids in copper interconnects using incoherent bright field tomography (English)
1 reference
David A. Muller
1 reference
Peter Ercius
1 reference
Lynne M. Gignac
1 reference
12 June 2006
1 reference
1 reference
88
1 reference
24
1 reference
243116
1 reference
1 reference
Identifiers
1 reference