High bandwidth piezoresistive force probes with integrated thermal actuation (Q30449995)
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| Language | Label | Description | Also known as |
|---|---|---|---|
| English | High bandwidth piezoresistive force probes with integrated thermal actuation |
scientific article |
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High bandwidth piezoresistive force probes with integrated thermal actuation (English)
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Joseph C Doll
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26 July 2012
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