The effect of photomask resolution on separation efficiency on microfabricated devices (Q33263508)
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Language | Label | Description | Also known as |
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English | The effect of photomask resolution on separation efficiency on microfabricated devices |
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The effect of photomask resolution on separation efficiency on microfabricated devices (English)
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Amanda R Meyer
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Anna M Clark
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14 August 2006
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10
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1355-1361
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Identifiers
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