3-D analysis of semiconductor dopant distributions in a patterned structure using LEAP. (Q33306772)
Jump to navigation
Jump to search
scientific article
| Language | Label | Description | Also known as |
|---|---|---|---|
| English | 3-D analysis of semiconductor dopant distributions in a patterned structure using LEAP. |
scientific article |
Statements
1 reference
3-D analysis of semiconductor dopant distributions in a patterned structure using LEAP. (English)
1 reference
Moore JS
1 reference
Jones KS
1 reference
Kennel H
1 reference
Corcoran S
1 reference
30 August 2007
1 reference
1 reference
108
1 reference
536-539
1 reference
1 reference
1 reference
Identifiers
1 reference
1 reference