Integrating optics and micro-mechanics in a single substrate: a step toward monolithic integration in fused silica (Q33461295)
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| Language | Label | Description | Also known as |
|---|---|---|---|
| English | Integrating optics and micro-mechanics in a single substrate: a step toward monolithic integration in fused silica |
scientific article |
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Integrating optics and micro-mechanics in a single substrate: a step toward monolithic integration in fused silica (English)
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Yves Bellouard
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Ali Said
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Philippe Bado
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1 August 2005
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13
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17
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6635-6644
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