Ultrafast and selective reduction of sidewall roughness in silicon waveguides using self-perfection by liquefaction (Q33490073)
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| Language | Label | Description | Also known as |
|---|---|---|---|
| English | Ultrafast and selective reduction of sidewall roughness in silicon waveguides using self-perfection by liquefaction |
scientific article |
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Ultrafast and selective reduction of sidewall roughness in silicon waveguides using self-perfection by liquefaction (English)
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Qiangfei Xia
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Patrick F Murphy
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He Gao
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Stephen Y Chou
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4 August 2009
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20
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34
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345302
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