Sub-100 nm silicon nanowires by laser interference lithography and metal-assisted etching (Q33527222)
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English | Sub-100 nm silicon nanowires by laser interference lithography and metal-assisted etching |
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Sub-100 nm silicon nanowires by laser interference lithography and metal-assisted etching (English)
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Johannes de Boor
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Nadine Geyer
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Jörg V Wittemann
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Ulrich Gösele
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Volker Schmidt
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29 January 2010
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21
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095302
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Identifiers
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