Design of an aberration corrected low-voltage SEM. (Q33668042)
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| Language | Label | Description | Also known as |
|---|---|---|---|
| English | Design of an aberration corrected low-voltage SEM. |
scientific article |
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Design of an aberration corrected low-voltage SEM. (English)
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R H van Aken
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D J Maas
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C W Hagen
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J E Barth
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P Kruit
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