Toward nanometer-scale optical photolithography: utilizing the near-field of bowtie optical nanoantennas (Q34565741)
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English | Toward nanometer-scale optical photolithography: utilizing the near-field of bowtie optical nanoantennas |
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Toward nanometer-scale optical photolithography: utilizing the near-field of bowtie optical nanoantennas (English)
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W E Moerner
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Arvind Sundaramurthy
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P James Schuck
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Nicholas R Conley
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David P Fromm
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Gordon S Kino
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