Hard and soft micromachining for BioMEMS: review of techniques and examples of applications in microfluidics and drug delivery (Q35637324)
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scientific article published on February 2004
Language | Label | Description | Also known as |
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English | Hard and soft micromachining for BioMEMS: review of techniques and examples of applications in microfluidics and drug delivery |
scientific article published on February 2004 |
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Hard and soft micromachining for BioMEMS: review of techniques and examples of applications in microfluidics and drug delivery (English)
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Babak Ziaie
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Ming Lei
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Yuandong Gu
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Ronald A Siegel
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1 February 2004
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56
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2
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145-172
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