Characterization of freestanding photoresist films for biological and MEMS applications (Q37190787)
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scientific article published on February 2013
Language | Label | Description | Also known as |
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English | Characterization of freestanding photoresist films for biological and MEMS applications |
scientific article published on February 2013 |
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Characterization of freestanding photoresist films for biological and MEMS applications (English)
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D M Ornoff
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Y Wang
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N L Allbritton
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1 February 2013
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