Towards nanometric resolution in multilayer depth profiling: a comparative study of RBS, SIMS, XPS and GDOES. (Q37671698)
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scientific article published on 09 January 2010
| Language | Label | Description | Also known as |
|---|---|---|---|
| English | Towards nanometric resolution in multilayer depth profiling: a comparative study of RBS, SIMS, XPS and GDOES. |
scientific article published on 09 January 2010 |
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Towards nanometric resolution in multilayer depth profiling: a comparative study of RBS, SIMS, XPS and GDOES. (English)
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Ramón Escobar Galindo
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Raul Gago
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David Duday
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Carlos Palacio
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9 January 2010
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396
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8
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2725-2740
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Identifiers
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