Synthesis of amorphous silicon carbide nanoparticles in a low temperature low pressure plasma reactor (Q42727918)

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scientific article published on 2 July 2008
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Synthesis of amorphous silicon carbide nanoparticles in a low temperature low pressure plasma reactor
scientific article published on 2 July 2008

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    Synthesis of amorphous silicon carbide nanoparticles in a low temperature low pressure plasma reactor (English)
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