22-nm immersion interference lithography (Q43780561)
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scientific article published in July 2006
Language | Label | Description | Also known as |
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English | 22-nm immersion interference lithography |
scientific article published in July 2006 |
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22-nm immersion interference lithography (English)
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T M Bloomstein
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Michael F Marchant
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Sandra Deneault
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Dennis E Hardy
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Mordechai Rothschild
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1 July 2006
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14
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14
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6434-6443
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Identifiers
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