Complementary metal oxide semiconductor cantilever arrays on a single chip: mass-sensitive detection of volatile organic compounds (Q44079247)
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| Language | Label | Description | Also known as |
|---|---|---|---|
| English | Complementary metal oxide semiconductor cantilever arrays on a single chip: mass-sensitive detection of volatile organic compounds |
scientific article |
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Complementary metal oxide semiconductor cantilever arrays on a single chip: mass-sensitive detection of volatile organic compounds (English)
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Dirk Lange
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Christoph Hagleitner
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Oliver Brand
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Henry Baltes
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1 July 2002
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