Super-resolution optical measurement of nanoscale photoacid distribution in lithographic materials (Q44538109)
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scientific article published on 2 November 2012
Language | Label | Description | Also known as |
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English | Super-resolution optical measurement of nanoscale photoacid distribution in lithographic materials |
scientific article published on 2 November 2012 |
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Super-resolution optical measurement of nanoscale photoacid distribution in lithographic materials (English)
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Adam J Berro
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Andrew J Berglund
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Peter T Carmichael
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J Alexander Liddle
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2 November 2012
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6
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11
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9496-9502
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Identifiers
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