Fabrication of 3D metal dot arrays by geometrically structured dynamic shadowing lithography (Q44969427)
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scientific article published on 17 October 2011
Language | Label | Description | Also known as |
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English | Fabrication of 3D metal dot arrays by geometrically structured dynamic shadowing lithography |
scientific article published on 17 October 2011 |
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Fabrication of 3D metal dot arrays by geometrically structured dynamic shadowing lithography (English)
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Shengrong Ye
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Aaron L Routzahn
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R Lloyd Carroll
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17 October 2011
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27
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22
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13806-13812
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