Characterization of pore structure in a nanoporous low-dielectric-constant thin film by neutron porosimetry and X-ray porosimetry. (Q44993530)
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| Language | Label | Description | Also known as |
|---|---|---|---|
| English | Characterization of pore structure in a nanoporous low-dielectric-constant thin film by neutron porosimetry and X-ray porosimetry. |
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Characterization of pore structure in a nanoporous low-dielectric-constant thin film by neutron porosimetry and X-ray porosimetry (English)
Hae-Jeong Lee
Christopher L Soles