Circuit fabrication at 17 nm half-pitch by nanoimprint lithography (Q45407297)
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scientific article published in March 2006
| Language | Label | Description | Also known as |
|---|---|---|---|
| English | Circuit fabrication at 17 nm half-pitch by nanoimprint lithography |
scientific article published in March 2006 |
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Circuit fabrication at 17 nm half-pitch by nanoimprint lithography (English)
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Gun-Young Jung
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Wei Wu
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Zhaoning Yu
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William M Tong
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Zhiyong Li
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Jonathan E Green
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Bonnie A Sheriff
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Akram Boukai
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Yuri Bunimovich
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James R Heath
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1 March 2006
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6
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3
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351-354
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