Circuit fabrication at 17 nm half-pitch by nanoimprint lithography (Q45407297)
Jump to navigation
Jump to search
scientific article published in March 2006
Language | Label | Description | Also known as |
---|---|---|---|
English | Circuit fabrication at 17 nm half-pitch by nanoimprint lithography |
scientific article published in March 2006 |
Statements
1 reference
Circuit fabrication at 17 nm half-pitch by nanoimprint lithography (English)
1 reference
1 reference
1 reference
Gun-Young Jung
1 reference
Wei Wu
1 reference
Zhaoning Yu
1 reference
William M Tong
1 reference
Zhiyong Li
1 reference
Jonathan E Green
1 reference
Bonnie A Sheriff
1 reference
Akram Boukai
1 reference
Yuri Bunimovich
1 reference
James R Heath
1 reference
1 March 2006
1 reference
1 reference
6
1 reference
3
1 reference
351-354
1 reference
Identifiers
1 reference
1 reference