Microdevice for measuring friction and adhesion properties of sidewall contact interfaces of microelectromechanical systems. (Q46009103)
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scientific article published in June 2007
| Language | Label | Description | Also known as |
|---|---|---|---|
| English | Microdevice for measuring friction and adhesion properties of sidewall contact interfaces of microelectromechanical systems. |
scientific article published in June 2007 |
Statements
Microdevice for measuring friction and adhesion properties of sidewall contact interfaces of microelectromechanical systems (English)