Design and performance of capping layers for extreme-ultraviolet multilayer mirrors (Q46017783)
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scientific article published on October 1, 2003
| Language | Label | Description | Also known as |
|---|---|---|---|
| English | Design and performance of capping layers for extreme-ultraviolet multilayer mirrors |
scientific article published on October 1, 2003 |
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Design and performance of capping layers for extreme-ultraviolet multilayer mirrors (English)
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Nhan Nguyen
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Jennifer Alameda
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Michael Malinowski
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Eric Gullikson
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Andrew Aquila
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Charles Tarrio
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Steven Grantham
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Henry N. Chapman
Jeffrey C. Robinson
1 October 2003
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42
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28
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5750-5758
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