Two-beam-current method for e-beam writing gray-scale masks and its application to high-resolution microstructures (Q46097654)
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scientific article published in June 2008
| Language | Label | Description | Also known as |
|---|---|---|---|
| English | Two-beam-current method for e-beam writing gray-scale masks and its application to high-resolution microstructures |
scientific article published in June 2008 |
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Two-beam-current method for e-beam writing gray-scale masks and its application to high-resolution microstructures (English)
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Zhou Zhou
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Sing H Lee
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1 June 2008
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47
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17
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3177-3184
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Identifiers
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