Synthesis of silicon nanowires and nanofin arrays using interference lithography and catalytic etching (Q47273187)

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scientific article published on 28 October 2008
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Synthesis of silicon nanowires and nanofin arrays using interference lithography and catalytic etching
scientific article published on 28 October 2008

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    Synthesis of silicon nanowires and nanofin arrays using interference lithography and catalytic etching (English)

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