Synthesis of silicon nanowires and nanofin arrays using interference lithography and catalytic etching (Q47273187)
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scientific article published on 28 October 2008
Language | Label | Description | Also known as |
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English | Synthesis of silicon nanowires and nanofin arrays using interference lithography and catalytic etching |
scientific article published on 28 October 2008 |
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Synthesis of silicon nanowires and nanofin arrays using interference lithography and catalytic etching (English)
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W K Choi
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T H Liew
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M K Dawood
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Henry I Smith
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C V Thompson
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M H Hong
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28 October 2008
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8
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11
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3799-3802
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Identifiers
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