Rapid sacrificial layer etching for the fabrication of nanochannels with integrated metal electrodes (Q47883287)

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scientific article published on 15 January 2008
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Rapid sacrificial layer etching for the fabrication of nanochannels with integrated metal electrodes
scientific article published on 15 January 2008

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    Rapid sacrificial layer etching for the fabrication of nanochannels with integrated metal electrodes (English)

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