Plasma‐enhanced chemical vapor deposited silicon carbide as an implantable dielectric coating (Q48147659)

From Wikidata
Jump to navigation Jump to search
scientific article published on December 1, 2003
edit
Language Label Description Also known as
English
Plasma‐enhanced chemical vapor deposited silicon carbide as an implantable dielectric coating
scientific article published on December 1, 2003

    Statements

    Plasma‐enhanced chemical vapor deposited silicon carbide as an implantable dielectric coating (English)
    Plasma-enhanced chemical vapor deposited silicon carbide as an implantable dielectric coating (English)

    Identifiers

     
    edit
      edit
        edit
          edit
            edit
              edit
                edit
                  edit
                    edit