Flexible mirror micromachined in silicon. (Q51606594)
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scientific article published in June 1995
Language | Label | Description | Also known as |
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English | Flexible mirror micromachined in silicon. |
scientific article published in June 1995 |
Statements
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Flexible mirror micromachined in silicon. (English)
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G Vdovin
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P M Sarro
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1 June 1995
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34
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2968-2972
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16
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Identifiers
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