Tuning sensitivity and selectivity of complementary metal oxide semiconductor-based capacitive chemical microsensors. (Q51681566)
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scientific article published in May 2004
Language | Label | Description | Also known as |
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English | Tuning sensitivity and selectivity of complementary metal oxide semiconductor-based capacitive chemical microsensors. |
scientific article published in May 2004 |
Statements
Tuning sensitivity and selectivity of complementary metal oxide semiconductor-based capacitive chemical microsensors. (English)
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Adrian M Kummer
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Henry Baltes
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1 May 2004
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76
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9
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2470-2477
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