Silicon-based microelectrodes for neurophysiology, micromachined from silicon-on-insulator wafers. (Q52579476)

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scientific article published in March 2000
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Silicon-based microelectrodes for neurophysiology, micromachined from silicon-on-insulator wafers.
scientific article published in March 2000

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    Silicon-based microelectrodes for neurophysiology, micromachined from silicon-on-insulator wafers. (English)

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