Control of channel doping concentration for enhancing the sensitivity of 'top-down' fabricated Si nanochannel FET biosensors. (Q53492909)
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scientific article published on 26 October 2009
Language | Label | Description | Also known as |
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English | Control of channel doping concentration for enhancing the sensitivity of 'top-down' fabricated Si nanochannel FET biosensors. |
scientific article published on 26 October 2009 |
Statements
Control of channel doping concentration for enhancing the sensitivity of 'top-down' fabricated Si nanochannel FET biosensors. (English)
Chan Woo Park
Chang-Geun Ahn
Jong-Heon Yang
In-Bok Baek
Chil Seong Ah
Ansoon Kim
Tae-Youb Kim
Gun Yong Sung
26 October 2009
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47
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