Refractive sapphire microlenses fabricated by chlorine-based inductively coupled plasma etching. (Q53545055)
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Language | Label | Description | Also known as |
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English | Refractive sapphire microlenses fabricated by chlorine-based inductively coupled plasma etching. |
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Refractive sapphire microlenses fabricated by chlorine-based inductively coupled plasma etching. (English)
Park SH
Jeon H
Sung YJ
Yeom GY
1 August 2001
40
22
3698-3702