Connectivity of features in microlens array reduction photolithography: generation of various patterns with a single photomask. (Q53677750)
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scientific article published in June 2002
| Language | Label | Description | Also known as |
|---|---|---|---|
| English | Connectivity of features in microlens array reduction photolithography: generation of various patterns with a single photomask. |
scientific article published in June 2002 |
Statements
Connectivity of features in microlens array reduction photolithography: generation of various patterns with a single photomask. (English)
George M Whitesides
Hongkai Wu
1 June 2002
124
25
7288-7289