MEMS power generator with transverse mode thin film PZT (Q56503439)
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| Language | Label | Description | Also known as |
|---|---|---|---|
| English | MEMS power generator with transverse mode thin film PZT |
No description defined |
Statements
MEMS power generator with transverse mode thin film PZT (English)
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July 2005
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122
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1
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16-22
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