Ultrahigh resolution of calixarene negative resist in electron beam lithography (Q56673767)

From Wikidata
Jump to navigation Jump to search
No description defined
edit
Language Label Description Also known as
English
Ultrahigh resolution of calixarene negative resist in electron beam lithography
No description defined

    Statements

    Ultrahigh resolution of calixarene negative resist in electron beam lithography (English)
    0 references
    J. Fujita
    0 references
    Y. Ohnishi
    0 references
    Y. Ochiai
    0 references
    S. Matsui
    0 references
    26 February 1996
    0 references
    68
    0 references
    9
    0 references
    1297-1299
    0 references

    Identifiers

    0 references
     
    edit
      edit
        edit
          edit
            edit
              edit
                edit
                  edit
                    edit