Three-dimensional thin-film Li-ion microbatteries for autonomous MEMS (Q56784011)

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Three-dimensional thin-film Li-ion microbatteries for autonomous MEMS
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    Three-dimensional thin-film Li-ion microbatteries for autonomous MEMS (English)
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    M. Nathan
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    D. Golodnitsky
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    V. Yufit
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    E. Strauss
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    T. Ripenbein
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    I. Shechtman
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    S. Menkin
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    E. Peled
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    October 2005
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    14
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    5
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    879-885
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