Optical projection lithography at half the Rayleigh resolution limit by two-photon exposure (Q57072561)
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Language | Label | Description | Also known as |
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English | Optical projection lithography at half the Rayleigh resolution limit by two-photon exposure |
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Optical projection lithography at half the Rayleigh resolution limit by two-photon exposure (English)
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1 February 1999
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38
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2
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334
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