Fabrication technology for silicon-based microprobe arrays used in acute and sub-chronic neural recording (Q57537868)

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Fabrication technology for silicon-based microprobe arrays used in acute and sub-chronic neural recording
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    Fabrication technology for silicon-based microprobe arrays used in acute and sub-chronic neural recording (English)
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    S Herwik
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    S Kisban
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    A A A Aarts
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    K Seidl
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    G Girardeau
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    K Benchenane
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    M B Zugaro
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    S I Wiener
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    O Paul
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    H P Neves
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    P Ruther
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    30 June 2009
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    19
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    7
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    074008
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