A new technique for fabricating three-dimensional micro- and nanostructures of various shapes (Q58331678)

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A new technique for fabricating three-dimensional micro- and nanostructures of various shapes
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    A new technique for fabricating three-dimensional micro- and nanostructures of various shapes (English)
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    V Ya Prinz
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    D Grützmacher
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    A Beyer
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    C David
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    B Ketterer
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    E Deckardt
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    28 November 2001
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    12
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    4
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    399-402
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