Fabrication and evaluation of single-crystal silicon cantilevers with ultra-low spring constants (Q58642490)
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| Language | Label | Description | Also known as |
|---|---|---|---|
| English | Fabrication and evaluation of single-crystal silicon cantilevers with ultra-low spring constants |
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Fabrication and evaluation of single-crystal silicon cantilevers with ultra-low spring constants (English)
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Ernst Meyer
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17 October 2005
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15
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11
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2179-2183
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