AFM study of perfluoroalkylsilane and alkylsilane self-assembled monolayers for anti-stiction in MEMS/NEMS (Q58800486)
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| Language | Label | Description | Also known as |
|---|---|---|---|
| English | AFM study of perfluoroalkylsilane and alkylsilane self-assembled monolayers for anti-stiction in MEMS/NEMS |
No description defined |
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AFM study of perfluoroalkylsilane and alkylsilane self-assembled monolayers for anti-stiction in MEMS/NEMS (English)
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November 2005
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105
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1-4
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176-188
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