Instrumentation for direct, low frequency scanning capacitance microscopy, and analysis of position dependent stray capacitance (Q58800893)

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Instrumentation for direct, low frequency scanning capacitance microscopy, and analysis of position dependent stray capacitance
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    Instrumentation for direct, low frequency scanning capacitance microscopy, and analysis of position dependent stray capacitance (English)
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    David T. Lee
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    J. P. Pelz
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    Bharat Bhushan
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    October 2002
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    73
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    10
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    3525-3533
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