Microtribological studies of doped single-crystal silicon and polysilicon films for MEMS devices (Q58801482)
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| Language | Label | Description | Also known as |
|---|---|---|---|
| English | Microtribological studies of doped single-crystal silicon and polysilicon films for MEMS devices |
No description defined |
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Microtribological studies of doped single-crystal silicon and polysilicon films for MEMS devices (English)
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November 1996
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57
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2
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91-102
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