New Surface Treatment and Microscale/Nanoscale Surface Patterning Using Electrostatically Clamped Stencil Mask (Q58949223)

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article by Sandrine Couderc et al published 24 September 2009 in Japanese Journal of Applied Physics
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New Surface Treatment and Microscale/Nanoscale Surface Patterning Using Electrostatically Clamped Stencil Mask
article by Sandrine Couderc et al published 24 September 2009 in Japanese Journal of Applied Physics

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    New Surface Treatment and Microscale/Nanoscale Surface Patterning Using Electrostatically Clamped Stencil Mask (English)
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    Sandrine Couderc
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    Vincent Blech
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    Beomjoon Kim
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    24 September 2009
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    48
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    9
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    095007
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