Lattice resolution in an electron-beam sensitive polymer (Q59099324)

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scientific article published in Nature
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Lattice resolution in an electron-beam sensitive polymer
scientific article published in Nature

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    Lattice resolution in an electron-beam sensitive polymer (English)
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    M. G. DOBB
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    A. M. HINDELEH
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    D. J. JOHNSON
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    B. P. SAVILLE
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    January 1975
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    253
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    5488
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    189-190
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