Fabrication of a 34 × 34 Crossbar Structure at 50 nm Half-pitch by UV-based Nanoimprint Lithography (Q59372758)

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Fabrication of a 34 × 34 Crossbar Structure at 50 nm Half-pitch by UV-based Nanoimprint Lithography
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    Fabrication of a 34 × 34 Crossbar Structure at 50 nm Half-pitch by UV-based Nanoimprint Lithography (English)
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    G. Y. Jung
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    S. Ganapathiappan
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    Douglas A. A. Ohlberg
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    Y. Chen
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    William M. Tong
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    R. Stanley Williams
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    July 2004
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    4
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    7
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    1225-1229
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