Piezoelectric nanoelectromechanical resonators based on aluminum nitride thin films (Q59443932)
Jump to navigation
Jump to search
scholarly article by R. B. Karabalin et al published 7 September 2009 in Applied Physics Letters
| Language | Label | Description | Also known as |
|---|---|---|---|
| English | Piezoelectric nanoelectromechanical resonators based on aluminum nitride thin films |
scholarly article by R. B. Karabalin et al published 7 September 2009 in Applied Physics Letters |
Statements
Piezoelectric nanoelectromechanical resonators based on aluminum nitride thin films (English)
0 references
7 September 2009
0 references
95
0 references
10
0 references
103111
0 references